JPS5312847U - - Google Patents

Info

Publication number
JPS5312847U
JPS5312847U JP9410976U JP9410976U JPS5312847U JP S5312847 U JPS5312847 U JP S5312847U JP 9410976 U JP9410976 U JP 9410976U JP 9410976 U JP9410976 U JP 9410976U JP S5312847 U JPS5312847 U JP S5312847U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9410976U
Other languages
Japanese (ja)
Other versions
JPS5640846Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976094109U priority Critical patent/JPS5640846Y2/ja
Publication of JPS5312847U publication Critical patent/JPS5312847U/ja
Application granted granted Critical
Publication of JPS5640846Y2 publication Critical patent/JPS5640846Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1976094109U 1976-07-15 1976-07-15 Expired JPS5640846Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976094109U JPS5640846Y2 (en]) 1976-07-15 1976-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976094109U JPS5640846Y2 (en]) 1976-07-15 1976-07-15

Publications (2)

Publication Number Publication Date
JPS5312847U true JPS5312847U (en]) 1978-02-02
JPS5640846Y2 JPS5640846Y2 (en]) 1981-09-24

Family

ID=28704669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976094109U Expired JPS5640846Y2 (en]) 1976-07-15 1976-07-15

Country Status (1)

Country Link
JP (1) JPS5640846Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002180238A (ja) * 2000-12-18 2002-06-26 Nikon Corp 成膜装置，成膜方法，光学部材，照明光学系，露光装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067732A (en]) * 1973-10-22 1975-06-06
JPS5067780A (en]) * 1973-10-23 1975-06-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067732A (en]) * 1973-10-22 1975-06-06
JPS5067780A (en]) * 1973-10-23 1975-06-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002180238A (ja) * 2000-12-18 2002-06-26 Nikon Corp 成膜装置，成膜方法，光学部材，照明光学系，露光装置

Also Published As

Publication number Publication date
JPS5640846Y2 (en]) 1981-09-24

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